Wright Etchant
AB Etchant

SEMICONDUCTOR DEFECT DELINEATION ETCHANTS

For characterization and identification of crystallographic defects in semiconductors.

WRIGHT ETCHANT - SILICON
AB ETCHANT - GALLIUM ARSENIDE


Wright Etchant reveals crystal dislocations, stacking faults, swirls, striations and slip lines. The etchant is applicable to (100) and (111) crystal orientations, for both p and n type crystals over a wide range of resistivities. Both float zone and Czochralski crystals may be characterized.

AB Etchant etches the (100) and (110) planes to reveal crystal dislocations, striations, faults, and slip lines.

The effectiveness of Wright Etchant and AB Etchant permits superior delineation of crystal defects. Slow etch rates and low exotherm account for precise control. Furthermore, the etched defects exhibit good crystallographic characteristics.

PROPERTIES:

Composition

Strong oxidizing acid

pH

< 1

Density

1.1 - 1.2

Etch Tank

Polyethylene or

polypropylene

Rinse

Water

Storage

Room temperature:

avoid heat

Disposal

Dilute with water:

neutralize with alkali


CAUTION: Contains Hydrofluoric Acid
Use appropriate precautions.

Available in quart & gallon polyethylene bottles.


Semiconductor Polishing Etchants and
Defect Delineation Etchants


SILICON POLISHING ETCHANTS

Silicon polishing etchants are classical oxidation/reduction formulations designed to provide a slow, controllable anisotropic etch of silicon. Polishing etchants typically operate at 30-50°C. The diffusion-limited etching process requires agitation for an effective polish.

SILICON POLISHING ETCHANTS

White Etch

15 second etch time

Planer Etch

5Å/minute


SEMICONDUCTOR DEFECT DELINEATION ETCHANTS

Defect delineation etchants reveal crystal dislocations, striations, slip lines, and faults. Both n and p type semiconductors may be characterized with defect delineation etchants.

Etchant

Material

Application

Wright Etchant

Silicon

<100>, <111> orientations

Sirtl Etchant

Silicon

<111> orientation

Dash Etchant

Silicon

<111> or <100> orientation for n or p type, p type preferred

Secco Etchant

Silicon

<100> or <111>

PND Etchant

Silicon

p-n delineation

Wright-Jenkins Etchant

Silicon

Leaves defect-free regions smooth

AG Etchant

Silicon

Epitaxial fault layers

Sponheimer-Mills Etchant

Silicon

Junction delineation

AB Etchant

Gallium Arsenide

<100>, <110> orientations