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Tin Oxide
Indium Tin Oxide Etchant TE-100


Tin Oxide/Indium Tin Oxide Etchant TE-100 is a selective etchant for tin oxide and indium tin oxide (ITO) layers in microelectronics applications. TE-100 effectively etches ITO and tin oxide films deposited on ceramics, dielectrics, semiconductors, and many metals. TE-100 provides excellent definition and etch rate control. Broad compatibility with positive and negative photoresists is offered. TE-100 is not compatible with nickel, copper, nichrome, and aluminum.

APPLICATION:

ITO films are best prepared by first depositing a film of indium-tin. The indium-tin film is then oxidized in an oxygen plasma or at elevated temperatures in an oxygenating atmosphere. When etched, indium is solublized as a trivalent aquocomplex [In(H2O)6]3+ while tin forms a [SnCl6]2- anion.


PROPERTIES:

Appearance

Dark amber

Etch Rate @ 25 °C

15-20 Å / sec (immersion)

Operating Temperature

40-50 °C

Rinse

Deionized Water

Storage

20-25 °C

Shelf Life

1 year at 15-25 °C


ETCH PASTE FOR INDIUM TIN OXIDE (ITO) ETCHING

DESCRIPTION:
Transene Solar Etch Paste ITO 126-1 is an un-filled paste based on a proprietary transition metal chemistry and designed for screen printing or dispensing applications. Solar Etch Paste ITO 126-1 offers the advantage of stable viscosity, fine line control, and uniform cure parameters.  SEP ITO 126-1 is suitable for use on both PET and glass substrates.  Because SEP ITO 126-1 contains no inert filler, optimum clarity and etch control are attainable.


PROPERTIES:

Appearance

Brown Paste

Solids %

80-90

Filler

None

pH

< 7

Bake Temperature

90-100 °C

Bake Time

5 - 15 Mintues

Rinse

Warm Water, Ultrasonic Agitation

Thinner

Glycerine


APPLICATION:

Briefly stir the paste by hand or with mechanical agitation to blend uniformly.  A small quantity of glycerine may be added to reduce the viscosity.  Apply the paste to the substrate.  Allow the part to heat at 90-100 °C for 5-15 minutes.  Rinse with warm water.  Ultrasonic agitation during rinsing is preferred to remove all traces of etchant.