Sequestrox 300 is an aqueous alkaline post etch residue remover compatible with gold, tantalum, titanium and silicon dioxide. Sequestrox 300 may be operated at temperatures as low as 40 °C, but higher temperatures will speed ash removal without compromising compatibility.
PROPERTIES
Property
Description
Appearance
Amber-yellow liquid
Composition
Alkaline Pyrocatechol Based
Boiling Point
118 °C
Operating Temperature
100 °C (may be used as cool as 40 °C)
Rinse
Water
Metallization
Attacks Al, Cu
Does not attack Au, Ta, Ti
Mild attack on Ag