Transene - SEQUESTROX 300

SEQUESTROX 300

Stable post-etch ash residue remover.

DESCRIPTION

Sequestrox 300 is an aqueous alkaline post etch residue remover compatible with gold, tantalum, titanium and silicon dioxide. Sequestrox 300 may be operated at temperatures as low as 40 °C, but higher temperatures will speed ash removal without compromising compatibility.

PROPERTIES

Property	Description
Appearance	Amber-yellow liquid
Composition	Alkaline Pyrocatechol Based
Boiling Point	118 °C
Operating Temperature	100 °C (may be used as cool as 40 °C)
Rinse	Water
Metallization	Attacks Al, Cu Does not attack Au, Ta, Ti Mild attack on Ag
SiO₂	Negligible