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SEQUESTROX 300

Stable post-etch ash residue remover.

DESCRIPTION


Sequestrox 300 is an aqueous alkaline post etch residue remover compatible with gold, tantalum, titanium and silicon dioxide. Sequestrox 300 may be operated at temperatures as low as 40 °C, but higher temperatures will speed ash removal without compromising compatibility.

PROPERTIES

Property

Description

Appearance

Amber-yellow liquid

Composition

Alkaline Pyrocatechol Based

Boiling Point

118 °C

Operating Temperature

100 °C (may be used as cool as 40 °C)

Rinse

Water

Metallization

Attacks Al, Cu
Does not attack Au, Ta, Ti
Mild attack on Ag

SiO2

Negligible