Back Streaming
a. with trapping
b. without trapping
Nil
(gm/cm2/min) 10-6 gm 10-6 gm
APPLICATIONS
VACOIL products are recommended as replacements for conventional diffusion pump fluids to obtain more efficient, economical, and trouble-free operation of vacuum systems. Exceptionally high vacuums of l0 -10 torr are obtainable. Typical vacuum systems in which VACOIL is applicable include: vacuum evaporators and metallizers; vacuum tube exhaust stations; space simulation chambers; vacuum sputtering; vacuum furnaces; electron beam equipment; thin film microcircuits; optical coatings and specialized instrumentation. The operation and care of these vacuum systems are very much simplified with VACOIL as the diffusion pump fluid. The use of liquid nitrogen is eliminated and the inadvertent exposure to air will not alter the diffusion fluid.
VACOIL products are especially recommended, because of rapid pump down, for vacuum systems which must be opened frequently. VACOIL is particularly useful also in microelectronics vacuum work and thin film device work to eliminate contamination which often results from diffusion oil vapor.
INSTRUCTIONS
VACOIL is used with standard heater input. No change in equipment is needed. The operating temperature is 225 °C to 250 °C. Baffle cooling is obtained in the conventional manner with flowing water; liquid nitrogen need not be used.