 |
|
 |
Etchant/Metal Compatibility Chart
|
|
Al
|
Au
|
Cr
|
Cu
|
Ni
|
Si
|
Si3N4
|
SiO2
|
Ti
|
W
|
GaAs
|
Ta/TaN
|
|
Aluminum A
|
etch
|
ok
|
etch
|
etch
|
etch
|
surf ox
|
slight
|
ok
|
ok
|
ok
|
etch
|
surf ox
|
|
Aluminum D
|
etch
|
ok
|
slight
|
ok
|
ok
|
ok
|
slight
|
ok
|
ok
|
ok
|
ok
|
ok
|
|
Chromium Etch 1020
|
etch
|
ok
|
etch
|
etch
|
etch
|
surf ox
|
ok
|
ok
|
ok
|
ok
|
etch
|
surf ox
|
|
Chromium Etch CRE-473
|
etch
|
ok
|
etch
|
etch
|
slight
|
ok
|
ok
|
ok
|
etch
|
ok
|
etch
|
ok
|
|
Chromium Etch TFD
|
etch
|
ok
|
etch
|
etch
|
etch
|
surf ox
|
ok
|
ok
|
ok
|
ok
|
etch
|
surf ox
|
|
Copper Etch 100
|
etch
|
ok
|
slight
|
etch
|
etch
|
ok
|
ok
|
ok
|
slight
|
ok
|
etch
|
ok
|
|
Copper Etch 200
|
etch
|
ok
|
slight
|
etch
|
etch
|
ok
|
ok
|
ok
|
slight
|
ok
|
etch
|
ok
|
|
Copper Etch APS-100
|
ok
|
ok
|
ok
|
etch
|
etch
|
ok
|
ok
|
ok
|
ok
|
slight
|
NA
|
ok
|
|
GE-8110
|
etch
|
etch
|
ok
|
corrode
|
ok
|
ok
|
ok
|
ok
|
ok
|
ok
|
etch
|
ok
|
|
GE-8111
|
etch
|
etch
|
ok
|
corrode
|
ok
|
ok
|
slight
|
ok
|
ok
|
ok
|
etch
|
ok
|
|
GE-8148
|
etch
|
etch
|
ok
|
corrode
|
ok
|
ok
|
ok
|
ok
|
ok
|
ok
|
etch
|
ok
|
|
Gold Etch TFA
|
etch
|
etch
|
ok
|
corrode
|
slight
|
ok
|
ok
|
ok
|
ok
|
ok
|
etch
|
ok
|
|
Nichrome Etch TFC
|
etch
|
ok
|
etch
|
etch
|
etch
|
surf ox
|
ok
|
ok
|
ok
|
ok
|
etch
|
surf ox
|
|
Nichrome Etch TFN
|
etch
|
ok
|
etch
|
etch
|
etch
|
surf ox
|
ok
|
ok
|
ok
|
ok
|
etch
|
surf ox
|
|
Nickel Etch TFB
|
etch
|
ok
|
etch
|
etch
|
etch
|
surf ox
|
ok
|
ok
|
ok
|
ok
|
etch
|
surf ox
|
|
Nickel Etch TFG
|
etch
|
ok
|
ok
|
ok
|
etch
|
ok
|
ok
|
ok
|
ok
|
ok
|
ok
|
ok
|
|
Nickel Etch Type I
|
etch
|
ok
|
slight
|
etch
|
etch
|
ok
|
ok
|
ok
|
slight
|
ok
|
etch
|
ok
|
|
Silver Etch TFS
|
etch
|
etch
|
ok
|
corrode
|
slight
|
ok
|
ok
|
ok
|
ok
|
ok
|
etch
|
ok
|
|
Tantalum Nitride Etch III
|
etch
|
ok
|
etch
|
etch
|
etch
|
etch
|
ok
|
etch
|
etch
|
ok
|
etch
|
etch
|
|
Tantalum Nitride SIE-8607
|
etch
|
ok
|
etch
|
etch
|
etch
|
etch
|
ok
|
etch
|
etch
|
ok
|
etch
|
etch
|
|
Titanium Etch TFT
|
etch
|
ok
|
etch
|
ok
|
ok
|
ok
|
etch
|
etch
|
etch
|
ok
|
ok
|
ok
|
|
Titanium Etch TFTN
|
etch
|
ok
|
etch
|
slight
|
slight
|
ok
|
ok
|
ok
|
etch
|
ok
|
etch
|
ok
|
|
Ti-Tungsten TiW-30
|
ok
|
ok
|
ok
|
etch
|
slight
|
ok
|
ok
|
ok
|
slight
|
slight
|
etch
|
ok
|
|
Tungsten Etch TFW
|
etch
|
ok |
etch
|
ok
|
ok |
slight
|
ok
|
slight
|
ok
|
etch
|
etch
|
ok
|
|
|
Al
|
Au
|
Cr
|
Cu
|
Ni
|
Si
|
Si3N4
|
SiO2
|
Ti
|
W
|
GaAs
|
Ta/TaN
|
LEGEND: etch = significant attach / slight = slight attack / ok = no attack / surf ox = surface oxidation / corrode = surface corrosion
|
 |
 |
 |
