SEARCH PRODUCTS

Chempol 48-52

DESCRIPTION

Chempol 48-52 is a white slurry containing a proprietary alpha-crystalline alumina.  With a lower hardness and small crystallite size than typical aluminas, these particulates provide a high degree of polish while minimizing scratching.

PROPERTIES

Property

Value

Appearance

White Slurry

Viscosity

400-600 cps

Alumina Crystallite Size

13-15 nanometers

Crystallite Surface Area

150 m2/gram minimum

Crystallite Pore Volume

0.9 mL/gram minimum

Silica Content

0.003% maximum

Iron Oxide Content

0.0025% maximum

pH

10 - 12

Rinse

Water

APPLICATION:

Chempol slurries should be mixed thoroughly before use.  High uniformity wafer-to-wafer and across the wafer is obtainable using Chempol 48-52.