SEARCH PRODUCTS
CHROME MASK ETCHANT CE-5M
DESCRIPTION:
Chrome Mask Etchant CE-5M is a ceric ammonium nitrate /perchloric acid etching solution for all types of chrome plates. Etch rate will depend upon substrate chrome density and process conditions. In general, the etch time usually ranges from 15 to 55 seconds at room temperature (25 oC). The etchant can be supplied with an added surfactant (CE-5MS). Chrome Mask Etchant CE-5M is suitable for sub-micron photolithography applications.
PHYSICAL & CHEMICAL PROPERTIES:
|
Appearance |
Clear, orange liquid |
|
pH (20oC) |
less than 1.0 |
|
Specific Gravity (20oC) |
1.103-1.105 |
|
Filtration |
0.2 micron |
|
Metals |
Meets or exceeds SEMI specifications |
|
Etch Rate |
50 Å / sec |
|
Operating Temperature |
20-25°C |
|
Tank |
Glass or polypropylene |
Storage and Handling:
Store at room temperature away from direct sunlight, keep container sealed when not in use. This is an acid oxidizing solution and should be handled with caution. In case contact is made to eyes or skin, flush with large quantities of water and contact a physician if irritation persists.
| 
